Silicon on Ceramics

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  • Stubenrauch M., Fischer M., Kremin C., Albrecht A., Hoffmann M.: "Black Silicon as a smart structure for the bonding of polymers with silicon"; in: Gessner T. (Ed.); Smart Systems Integration, p. 162-166, VDE Verlag, 2007

  • Fischer M., Bartsch de Torres H., Stubenrauch M., Müller J., Hoffmann M.: "Bonding of LTCC and silicon substrates using adapted Black Silicon"; Conference on Wafer Bonding for MEMS Technologies and Wafer Level Integration,  December 9-11, 2007, Halle/Saale; in: Bagdan J. and Knechtel R. (Ed.); Book of Abstracts, pp. 62-64, 2007
  • Stubenrauch M., Fischer M., Kremin C., Hoffmann M., Müller J.: "Bonding Technology for Silicon with Polymers and Ceramics Based on Black Silicon"; in: MST News, no.1/07, January 2007, pp. 40-41, Publisher: VDI/VDE-IT.
  • Stubenrauch M., Fischer M., Kremin C., Hoffmann M., Müller J.: "Bonding of silicon with filled and unfilled polymers based on black silicon"; in: Micro & Nano Letters, March 2007, Vol. 2, Issue 1, pp. 6-8.
  • Fischer M., Stubenrauch M., Hintz M., Hoffmann M., Müller J.: "Bonding of ceramic and silicon – new options and applications"; in: Gessner T. (Ed.); Smart Systems Integration, pp. 477-479, VDE Verlag, 2007
    Download: Bonding of Ceramic and Silicon
  • Stubenrauch M., Fischer M., Kremin C., Lilienthal K., Fröber U., Voges D., Witte H., Hoffmann M.: "Black Silicon – einstellbare Nanostrukturen mit neuen Applikationsfeldern"; 3. Thüringer Grenz- und Oberflächentage & 6. Biomaterial-Kolloquium, Erfurt Sept. 2007
  • Fischer M., Albrecht A., Stubenrauch M. (15.02.2007): "Microcomponent with nanostructured silicon surface, method for producing it, and connection arrangement comprising such microcomponents"
    WO 2007/017458 A1
 
  • Stubenrauch M., Fischer M., Bernasch M., Bagdahn J.: "Room temperature bonding of nanostructured silicon wafers and mechanical characterization"; 2nd International Workshop on Wafer Bonding for MEMS Technologies, April 2006; Halle/Saale, Germany,
  • Fischer M., Stubenrauch M., Kups Th., Romanus H. , Morales F.M., Ecke G., Hoffmann M., Knedlik C., Ambacher O. and J. Pezoldt: "Self organization and properties of Black Silicon"; 51st IWK – Internat. Wissenschaftliches Kolloquium, September 11 - 15, 2006, TU Ilmenau
    Download: Self organization and properties of Black Silicon
  • Fischer M., Thelemann T., Stubenrauch M.: "LTCC Interconnects In Different Scales"; 1st MacroNano® Kolloquium, November 29 - 30, 2006, TU Ilmenau
  • Stubenrauch M., Fischer M., Kremin C., Stoebenau S., Albrecht A., Nagel O.: "Black silicon - new functionalities in microsystems"; J. Micromech. Microeng. 16 (2006), pp. 82-87
  • Lebedev V., Morales F. M. , Fischer M., Himmerlich M., Krischok S., Schäfer J. A., Ambacher O.: "Nanocrystalline AlN:Si field emission arrays for vacuum electronics"; in: physica status solidi (a) Volume 203, Issue 7,  May 2006, pp. 1839-1844.

 

 


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