Silicon on Ceramics

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  • Stubenrauch M., Fischer M., Bernasch M., Bagdahn J.: "Room temperature bonding of nanostructured silicon wafers and mechanical characterization"; 2nd International Workshop on Wafer Bonding for MEMS Technologies, April 2006; Halle/Saale, Germany,
  • Fischer M., Stubenrauch M., Kups Th., Romanus H. , Morales F.M., Ecke G., Hoffmann M., Knedlik C., Ambacher O. and J. Pezoldt: "Self organization and properties of Black Silicon"; 51st IWK – Internat. Wissenschaftliches Kolloquium, September 11 - 15, 2006, TU Ilmenau
    Download: Self organization and properties of Black Silicon
  • Fischer M., Thelemann T., Stubenrauch M.: "LTCC Interconnects In Different Scales"; 1st MacroNano® Kolloquium, November 29 - 30, 2006, TU Ilmenau
  • Stubenrauch M., Fischer M., Kremin C., Stoebenau S., Albrecht A., Nagel O.: "Black silicon - new functionalities in microsystems"; J. Micromech. Microeng. 16 (2006), pp. 82-87
  • Lebedev V., Morales F. M. , Fischer M., Himmerlich M., Krischok S., Schäfer J. A., Ambacher O.: "Nanocrystalline AlN:Si field emission arrays for vacuum electronics"; in: physica status solidi (a) Volume 203, Issue 7,  May 2006, pp. 1839-1844.