Silicon on Ceramics

  • INCREASE FONT SIZE
  • DEFAULT FONT SIZE
  • DECREASE FONT SIZE
Start Publications
  • Müller, J.; Fischer, M.; Bartsch de Torres, H.; Pawlowski, B.; Barth, S.: "Advantages of a new wafer level integration concept based on direct bonded Silicon on LTCC" - Proc. of Pan Pacific Symposium January 26-28, 2010, Kauai/Hawaii, USA.

 
  • Fischer, M.; Mache, T.; Pawlowski, B.; Schabbel, D.; Müller, J.: "SiCer – An advanced substrate for 3D integrated nano and micro systems" - Smart Systems Integration 2011, Dresden, 22-23 March 2011; ISBN 978-3-8007-3324-8
  • Pezoldt, J.; Kups, T.; Stubenrauch, M.; Fischer, M.: "Black luminescent silicon" - Phys. Status Solidi C 8, No. 3, 1021–1026 (2011) / DOI 10.1002/pssc.201000388
 
  • Fischer, M.; Mache, T.; Pawlowski, B.; Schabbel, D.; Müller, J.: "SiCer - A substrate to combine ceramic and silicon based micro systems". - 2012 IMAPS/ACerS 8th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT), April 16 -19, 2012, Erfurt, Germany
  • Bley, T.; Pignanelli, E.; Fischer, M.; Günschmann, S.; Müller, J.; Schütze A.: " IR Optical Oil Quality Sensor System for High Pressure Applications"Mechatronics 2012 - The 13th Mechatronics Forum International Conference, Linz, Austria, September 17-19, 2012, Proceedings Vol. 2/3, ISBN 978-3-99033-046-5, pp. 351-358

 
  • Fischer, M.; Bartsch de Torres, H.; Hoffmann, M.; Müller, J.; Pawlowski, B.; Barth, S.: "Silizium-Keramik-Verbundsubstrat eine neue Plattform für die Mikro-Nano-Integration". - In: Mikro-Nano-Integration / GMM-Workshop: "Mikro-Nano-Integration" ; 1 (Seeheim) : 2009.03.12-13. - Berlin [u.a.] : VDE-Verl. (2009)
  • Fischer, M.; Bartsch de Torres, H.; Pawlowski, B.; Gade, R.; Barth, S.; Mach, M.; Stubenrauch, M.; Hoffmann, M.; Müller, J.: "Silicon on ceramics - a new integration concept for silicon devices to LTCC. - In: Journal of microelectronics and electronic packaging". - Washington, DC : IMAPS, ISSN 15514897, Bd. 6 (2009), 1, S. 1-5
 
  • Fischer M., Bartsch de Torres H., Pawlowski B., Gade R., Barth S., Mach M., Stubenrauch M., Hoffmann M. and J. Müller: "Silicon on Ceramics - A new Integration Concept for Silicon Devices to  LTCC"; 2008 IMAPS/ACerS 4th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT), April 21 -24, 2008, Munich, Germany
  • Fischer M., Bartsch de Torres H., Pawlowski B., Gade R., Barth S., , Hoffmann M. and J. Müller: "Silicon on Ceramics - A New Concept for Micro-Nano-Integration on Wafer Level"; NSTI-Nanotech, June 1-5, 2008, Boston; www.nsti.org, ISBN 978-1-4200-8505-1, Vol. 3
  • Bartsch de Torres H., Fischer M., Gade R., Mach M., Müller J., Hoffmann M., Pawlowski B., Barth S.: "A new method for wafer level integration of silicon components on LTCC"; in: Gessner T. (Ed.); Smart Systems Integration, p. 392-394, VDE Verlag, 2008
    Download: Wafer level integration of Silicon Components
 
More Articles...
  • «
  •  Start 
  •  Prev 
  •  1 
  •  2 
  •  Next 
  •  End 
  • »


Page 1 of 2